Effects of Strain on Diborane Dissociative Adsorption and Boron Incorporation on Si0.5Ge0.5(001)-2 x 1 Surfaces

Rengo, GianlucaGianlucaRengoPourtois, GeoffreyGeoffreyPourtoisPorret, ClémentClémentPorretLoo, RogerRogerLooVantomme, AndreAndreVantomme2024-09-242024-07-282024-09-2420241932-7447WOS:001271999100001https://imec-publications.be/handle/20.500.12860/44202Effects of Strain on Diborane Dissociative Adsorption and Boron Incorporation on Si0.5Ge0.5(001)-2 x 1 SurfacesJournal article10.1021/acs.jpcc.4c03110WOS:001271999100001HYDROGEN DESORPTIONGROWTHCOMPENSATIONDEACTIVATIONCHEMISTRYDIFFUSIONKINETICSSI(001)POINTSDIMERS