Monte Carlo comparison of n-type and p-type nanosheets with FinFETs: Effect of the number of sheets

Bufler, FabianFabianBuflerJang, DoyoungDoyoungJangHellings, GeertGeertHellingsEneman, GeertGeertEnemanMatagne, PhilippePhilippeMatagneSpessot, AlessioAlessioSpessotNa, Myung HeeMyung HeeNa2021-10-282021-10-2820200018-9383https://imec-publications.be/handle/20.500.12860/34827Monte Carlo comparison of n-type and p-type nanosheets with FinFETs: Effect of the number of sheetsJournal articlehttps://ieeexplore.ieee.org/document/9204768