Samavedam, SriSriSamavedamRyckaert, JulienJulienRyckaertBeyne, EricEricBeyneRonse, KurtKurtRonseHoriguchi, NaotoNaotoHoriguchiTokei, ZsoltZsoltTokeiRadu, IulianaIulianaRaduGarcia Bardon, MarieMarieGarcia BardonNa, Myung HeeMyung HeeNaSpessot, AlessioAlessioSpessotBiesemans, SergeSergeBiesemans2021-12-202021-12-062021-12-2020202380-9248WOS:000717011600132https://imec-publications.be/handle/20.500.12860/38539Future Logic Scaling: Towards Atomic Channels and Deconstructed ChipsProceedings paper10.1109/IEDM13553.2020.9372023978-1-7281-8888-1WOS:000717011600132TECHNOLOGYRUTHENIUM