Pulsed laser deposited-PZT based MEMS energy harvesting devices

Jambunathan, MadhuMadhuJambunathanElfrink, ReneReneElfrinkVullers, RuudRuudVullersvan Schaijk, RobRobvan SchaijkDekkers, M.M.DekkersBroekmaat, J.J.Broekmaat2021-10-202021-10-202012https://imec-publications.be/handle/20.500.12860/20859Pulsed laser deposited-PZT based MEMS energy harvesting devicesProceedings paper