Adel, Michael E.Michael E.AdelTarshish-Shapir, InnaInnaTarshish-ShapirGready, DavidDavidGreadyGhinovker, MarkMarkGhinovkerDror, ChenChenDrorGodny, StephaneStephaneGodny2021-10-222021-10-222015https://imec-publications.be/handle/20.500.12860/24914Stack and topography verification as an enabler for computational metrology target designProceedings paperhttp://proceedings.spiedigitallibrary.org/proceeding.aspx?articleid=2272964