Study of EUV stochastic defect on wafer yield

Tsai, Yi-PeiYi-PeiTsaiChang, Chieh-MiaoChieh-MiaoChangChang, Yi-HanYi-HanChangOak, ApoorvaApoorvaOakTrivkovic, DarkoDarkoTrivkovicKim, Ryan Ryoung hanRyan Ryoung hanKim2024-08-202024-06-152024-08-202024978-1-5106-7214-70277-786XWOS:001224292100003https://imec-publications.be/handle/20.500.12860/44032Study of EUV stochastic defect on wafer yieldProceedings paper10.1117/12.3010858978-1-5106-7215-4WOS:001224292100003