Influence of STI trench fill and dummy design on CMP behavior

Ong, PatrickPatrickOngDevriendt, KatiaKatiaDevriendtRedolfi, AugustoAugustoRedolfiOkuno, YasutoshiYasutoshiOkunoHernandez, Jose LuisJose LuisHernandez2021-10-162021-10-162007https://imec-publications.be/handle/20.500.12860/12645Influence of STI trench fill and dummy design on CMP behaviorProceedings paper