Integrating diamond pyramids into metal cantilevers and using them as electrical AFM probes

Hantschel, ThomasThomasHantschelSlesazeck, StefanStefanSlesazeckNiedermann, P.P.NiedermannEyben, PierrePierreEybenVandervorst, WilfriedWilfriedVandervorst2021-10-142021-10-142001https://imec-publications.be/handle/20.500.12860/5332Integrating diamond pyramids into metal cantilevers and using them as electrical AFM probesJournal article