Chandra, A.A.ChandraBastawros, A. F.A. F.BastawrosBiswas, R.R.BiswasSherman, P. J.P. J.ShermanArmini, SilviaSilviaArmini2021-10-172021-10-172008https://imec-publications.be/handle/20.500.12860/13493Defectivity in chemical mechanical planarization: A multiscale approachProceedings paper