Dynamic Time Warping for Time Series Data Analysis of STI Etching

Milenin, AlexeyAlexeyMileninChan, BTBTChanLazzarino, FredericFredericLazzarino2024-01-182022-11-162024-01-182022-11N/Ahttps://imec-publications.be/handle/20.500.12860/40742Dynamic Time Warping for Time Series Data Analysis of STI EtchingMeeting abstractEngineeringDynamic Time Warping, Time Series Data Analysis, STI Etching