Enabling CMOS scaling towards 3nm and beyond

Mocuta, AndaAndaMocutaWeckx, PieterPieterWeckxDemuynck, StevenStevenDemuynckRadisic, AlexAlexRadisicOniki, YusukeYusukeOnikiRyckaert, JulienJulienRyckaert2021-10-252021-10-252018https://imec-publications.be/handle/20.500.12860/31354Enabling CMOS scaling towards 3nm and beyondProceedings paperhttps://ieeexplore.ieee.org/document/8510683