Lee, JeonghoonJeonghoonLeeHwang, SoobinSoobinHwangPham, Van TuongVan TuongPhamMiyaguchi, KenichiKenichiMiyaguchiNiroomand, ArdavanArdavanNiroomandVerstraete, LanderLanderVerstraeteYang, KihoKihoYangGillijns, WernerWernerGillijnsDas, ShubhankarShubhankarDasBlanco, VictorVictorBlancoHalder, SandipSandipHalderSuh, Hyo SeonHyo SeonSuhSherazi, YasserYasserSheraziTrivkovic, DarkoDarkoTrivkovicVanelderen, PieterPieterVanelderenLee, InheeInheeLeeRonse, KurtKurtRonseKim, Ryan Ryoung HanRyan Ryoung HanKim2025-07-312025-07-312025978-1-5106-8636-60277-786XWOS:001517345700023https://imec-publications.be/handle/20.500.12860/45972EUV DRAM Patterning Historic Overview and Future AssumptionProceedings paper10.1117/12.3052340978-1-5106-8637-3WOS:001517345700023