Nano-ridge engineering of GaSb for the integration of InAs/GaSb heterostructures on 300 mm (001) Si

Baryshnikova, MarinaMarinaBaryshnikovaMols, YvesYvesMolsIshii, YoshiyukiYoshiyukiIshiiAlcotte, ReynaldReynaldAlcotteHan, HanHanHanHantschel, ThomasThomasHantschelRichard, OlivierOlivierRichardPantouvaki, MariannaMariannaPantouvakiVan Campenhout, JorisJorisVan CampenhoutVan Thourhout, DriesDriesVan ThourhoutLanger, RobertRobertLangerKunert, BernardetteBernardetteKunert2021-10-282021-10-2820202073-4352https://imec-publications.be/handle/20.500.12860/34701Nano-ridge engineering of GaSb for the integration of InAs/GaSb heterostructures on 300 mm (001) SiJournal article10.3390/cryst10040330