Tsvetanova, DianaDianaTsvetanovaVos, RitaRitaVosVanstreels, KrisKrisVanstreelsSonnemans, RogerRogerSonnemansBerry, IvanIvanBerryWaldfried, CarloCarloWaldfriedMattson, DavidDavidMattsonDeLuca, JJDeLucaVereecke, GuyGuyVereeckeMertens, PaulPaulMertensParac-Vogt, TatjanaTatjanaParac-VogtHeyns, MarcMarcHeyns2021-10-182021-10-182010https://imec-publications.be/handle/20.500.12860/18108Non-oxidizing solvent-based strip of ion implanted photoresistMeeting abstract