Guo, WeiWeiGuoKarmarkar, AdityaAdityaKarmarkarXu, XiaopengXiaopengXuVan der Plas, GeertGeertVan der PlasVan Huylenbroeck, StefaanStefaanVan HuylenbroeckGonzalez, MarioMarioGonzalezAbsil, PhilippePhilippeAbsilEl Sayed, KarimKarimEl SayedBeyne, EricEricBeyne2021-10-222021-10-222015https://imec-publications.be/handle/20.500.12860/25346Analysis of copper plasticity impact in TSV-middle and backside TSV-last fabrication processesProceedings paperhttp://ieeexplore.ieee.org/xpl/articleDetails.jsp?arnumber=7159723