Kesters, ElsElsKestersLe, Quoc ToanQuoc ToanLeLux, MarcelMarcelLuxVereecke, GuyGuyVereeckeStruyf, HerbertHerbertStruyfDe Gendt, StefanStefanDe Gendt2021-10-192021-10-192011https://imec-publications.be/handle/20.500.12860/19168PR and BARC wet strip in BEOL patterning using a UV-enabled aqueous processMeeting abstract