Sedky, SherifSherifSedkyWitvrouw, AnnAnnWitvrouwCaymax, MattyMattyCaymaxRoussel, PhilippePhilippeRoussel2021-10-142021-10-142001https://imec-publications.be/handle/20.500.12860/5643Effect of deposition and annealing temperature on the structural and mechanical properties of poly SiGeProceedings paper