CMOS-based high-density silicon microprobe array for electronic depth control in neural recording

Seidl, K.K.SeidlHerwik, S.S.HerwikNurcahyo, Y.Y.NurcahyoTorfs, TomTomTorfsKeller, M.M.KellerSchüttler, M.M.SchüttlerPereira Neves, HerculesHerculesPereira NevesStieglitz, T.T.StieglitzPaul, O.O.PaulRuther, P.P.Ruther2021-10-182021-10-182009https://imec-publications.be/handle/20.500.12860/16189CMOS-based high-density silicon microprobe array for electronic depth control in neural recordingProceedings paper