Line edge roughness and critical dimension variation: Fractal characterization and comparison using model functions

Constantoudis, V.V.ConstantoudisPatsis, G.P.G.P.PatsisLeunissen, PeterPeterLeunissenGogolides, E.E.Gogolides2021-10-152021-10-152004-08https://imec-publications.be/handle/20.500.12860/8718Line edge roughness and critical dimension variation: Fractal characterization and comparison using model functionsJournal article