Vandervorst, WilfriedWilfriedVandervorstClarysse, TrudoTrudoClarysseDuhayon, NatasjaNatasjaDuhayonEyben, PierrePierreEybenHantschel, ThomasThomasHantschelXu, MingweiMingweiXuJanssens, TomTomJanssensDe Witte, HildeHildeDe WitteConard, ThierryThierryConardDeleu, JeroenJeroenDeleuBadenes, GonçalGonçalBadenes2021-10-142021-10-142000https://imec-publications.be/handle/20.500.12860/4880Ultra-shallow junction profilingProceedings paper