Characterization of ALD diffusion barrier on low-k dielectric polymer by contact angle measurements

Martin Hoyas, AnaAnaMartin HoyasSchuhmacher, JorgJorgSchuhmacherCelis, Jean-PierreJean-PierreCelisMaex, KarenKarenMaex2021-10-142021-10-142002https://imec-publications.be/handle/20.500.12860/6584Characterization of ALD diffusion barrier on low-k dielectric polymer by contact angle measurementsOral presentation