Redzheb, MuradMuradRedzhebArmini, SilviaSilviaArminiVanstreels, KrisKrisVanstreelsMeersschaut, JohanJohanMeersschautBaklanov, MikhailMikhailBaklanovWang, YunYunWangChen, ShaoyinShaoyinChenLe, VanVanLeAwdshiew, MichaelMichaelAwdshiewVan der Voort, PascalPascalVan der Voort2021-10-232021-10-232016https://imec-publications.be/handle/20.500.12860/27201Laser anneal of oxycarbosilane low-k filmProceedings paperhttp://ieeexplore.ieee.org/document/7507716/