CMOS process-compatible 200mm polycrystalline AlN substrates for GaN power transistors

Geens, KarenKarenGeensVan Hove, MarleenMarleenVan HoveLi, XiangdongXiangdongLiZhao, MingMingZhaoatka, AlexanderAlexanderatkaVincze, AndrejAndrejVinczeDecoutere, StefaanStefaanDecoutere2021-10-242021-10-242017https://imec-publications.be/handle/20.500.12860/28380CMOS process-compatible 200mm polycrystalline AlN substrates for GaN power transistorsProceedings paperhttps://wocsdice2017.iuma.ulpgc.es/wp-content/uploads/2017/05/Wocsdice2017_Final_Programme.pdf