Influence of precursor gas on SiGe epitaxial material quality in terms of structural and electrical defects

Ike, ShinichiShinichiIkeSimoen, EddyEddySimoenShimura, YosukeYosukeShimuraHikavyy, AndriyAndriyHikavyyVandervorst, WilfriedWilfriedVandervorstLoo, RogerRogerLooTakeuchi, WakanaWakanaTakeuchiNakatsuka, OsamuOsamuNakatsukaZaima, ShigeakiShigeakiZaima2021-10-232021-10-2320160021-4922https://imec-publications.be/handle/20.500.12860/26763Influence of precursor gas on SiGe epitaxial material quality in terms of structural and electrical defectsJournal articlehttp://iopscience.iop.org/article/10.7567/JJAP.55.04EJ11