Declerck, GilbertGilbertDeclerck2021-10-182021-10-1820101363-5182https://imec-publications.be/handle/20.500.12860/16989The 2009 ITRS roadmap: EHS and heterogeneous challengesJournal articlehttp://www.future-fab.com/content/PDF/FF32_ITRS_Jan_10.pdf