Process tolerant design of BAW resonators via hole engineering

Figeys, BrunoBrunoFigeysJansen, RoelofRoelofJansenNauwelaers, BartBartNauwelaersTilmans, HarrieHarrieTilmansRottenberg, XavierXavierRottenberg2021-10-212021-10-212013https://imec-publications.be/handle/20.500.12860/22342Process tolerant design of BAW resonators via hole engineeringProceedings paper