Johnson, J.J.JohnsonGoux, LudovicLudovicGouxSchwitters, MichaelMichaelSchwittersParaschiv, VasileVasileParaschivMaes, DavidDavidMaesHaspeslagh, LucLucHaspeslaghWouters, DirkDirkWoutersCaputa, ConcettaConcettaCaputaCasella, C.C.CasellaZambrano, R.R.ZambranoVecchio, EmmaEmmaVecchioMonchoix, HervéHervéMonchoixVan Autryve, LucLucVan AutryveLisoni, JuditJuditLisoni2021-10-152021-10-152003https://imec-publications.be/handle/20.500.12860/7699Integration of ferroelectric SrBi2Ta2O9-based capacitors beyond 0.18 CMOS technologyOral presentation