Raghavan, NagarajanNagarajanRaghavanPey, Kin LeongKin LeongPeyWu, XingXingWuLiu, WenhuWenhuLiuLi, XiangXiangLiBosman, BosmanBosmanBosmanKauerauf, ThomasThomasKauerauf2021-10-192021-10-1920110741-3106https://imec-publications.be/handle/20.500.12860/19648Oxygen soluble gate electrodes for prolonged high-kappa gate-stack reliabilityJournal article