Vos, RitaRitaVosLux, MarcelMarcelLuxConard, ThierryThierryConardDe Witte, HildeHildeDe WitteMertens, PaulPaulMertensHeyns, MarcMarcHeynsHatcher, Z.Z.Hatcher2021-10-142021-10-142001https://imec-publications.be/handle/20.500.12860/5822Improved phosphoric acid mixtures for nitride stripProceedings paper