Charging and the secondary electron-electron emission on a trench surface: broadening and shift of ion energy spectrum at plasma trench etching

Palov, A PA PPalovMankelevich, Yu AYu AMankelevichRakhimova, T VT VRakhimovaShamiryan, DenisDenisShamiryan2021-10-182021-10-1820100022-3727https://imec-publications.be/handle/20.500.12860/17757Charging and the secondary electron-electron emission on a trench surface: broadening and shift of ion energy spectrum at plasma trench etchingJournal article