A deep-level analysis of Ni-Au/AlN(111) p-Si metal-insulator-semiconductor capacitors

Simoen, EddyEddySimoenVisalli, DomenicaDomenicaVisalliVan Hove, MarleenMarleenVan HoveLeys, MaartenMaartenLeysBorghs, GustaafGustaafBorghs2021-10-192021-10-1920110022-3727https://imec-publications.be/handle/20.500.12860/19797A deep-level analysis of Ni-Au/AlN(111) p-Si metal-insulator-semiconductor capacitorsJournal article