Lorusso, GianGianLorusso2024-06-152024-06-152024978-1-5106-7216-10277-786XWOS:001224296200030https://imec-publications.be/handle/20.500.12860/44040Trends in e-beam Metrology and InspectionProceedings paper10.1117/12.3010120978-1-5106-7217-8WOS:001224296200030SEM