Determination of stress profile and optimization of stress gradient in PECVD poly-SiGe films

Molfese, AntonioAntonioMolfeseMehta, AnshuAnshuMehtaWitvrouw, AnnAnnWitvrouw2021-10-152021-10-152004https://imec-publications.be/handle/20.500.12860/9318Determination of stress profile and optimization of stress gradient in PECVD poly-SiGe filmsJournal article