Capacitance-frequency estimates of border-trap densities in multi-fin MOS capacitors

Jiang, RongRongJiangZhang, En XiaEn XiaZhangLiao, WenjunWenjunLiaoLiang, ChundongChundongLiangFleetwood, DanielDanielFleetwoodSchrimpf, RonaldRonaldSchrimpfReed, RobertRobertReedLinten, DimitriDimitriLintenMitard, JeromeJeromeMitardCollaert, NadineNadineCollaertSioncke, SonjaSonjaSionckeWaldron, NiamhNiamhWaldron2021-10-252021-10-2520180018-9499https://imec-publications.be/handle/20.500.12860/30972Capacitance-frequency estimates of border-trap densities in multi-fin MOS capacitorsJournal articlehttp://ieeexplore.ieee.org/document/8063356/