Granata, StefanoStefanoGranataBearda, TwanTwanBeardaBeaucarne, GuyGuyBeaucarneAbdulraheem, YaserYaserAbdulraheemGordon, IvanIvanGordonPoortmans, JefJefPoortmansMertens, RobertRobertMertens2021-10-222021-10-2220141862-6254https://imec-publications.be/handle/20.500.12860/23878Silicone oxidation for a-Si:H passivation of wafers bonded to glassJournal articlehttp://onlinelibrary.wiley.com/doi/10.1002/pssr.201409081/abstract