Proposal for a new process flow for the fabrication of silicon-based complementary MOD-MOSFETs without ion implantation

Augusto, CarlosCarlosAugustoDe Meyer, KristinKristinDe Meyer2021-09-302021-09-301997https://imec-publications.be/handle/20.500.12860/1700Proposal for a new process flow for the fabrication of silicon-based complementary MOD-MOSFETs without ion implantationJournal article