CNT EUV pellicle tunability and performance in a scanner-like environment

Timmermans, MarinaMarinaTimmermansPollentier, IvanIvanPollentierKorytov, MaximMaximKorytovNuytten, ThomasThomasNuyttenSergeant, StefanieStefanieSergeantConard, ThierryThierryConardMeersschaut, JohanJohanMeersschautZhang, YideYideZhangDialameh, MasoudMasoudDialamehAlaerts, WilfriedWilfriedAlaertsJazaeri, EhsanEhsanJazaeriSpampinato, ValentinaValentinaSpampinatoFranquet, AlexisAlexisFranquetBrems, StevenStevenBremsHuyghebaert, CedricCedricHuyghebaertGallagher, EmilyEmilyGallagher2023-01-192021-11-022023-01-192021978-1-5106-4051-10277-786XWOS:000672825700020https://imec-publications.be/handle/20.500.12860/37680CNT EUV pellicle tunability and performance in a scanner-like environmentProceedings paper10.1117/12.2584519978-1-5106-4052-8WOS:000672825700020CARBON NANOTUBESELECTRON-BEAMRAMAN-SPECTROSCOPYPURIFICATIONHYDROGENATION