Process development on large-topography microstructures for thermoelectric energy harvesters

Su, JialeJialeSuVullers, RuudRuudVullersGoedbloed, MartijnMartijnGoedbloedvan Andel, YvonneYvonnevan AndelLeonov, VladimirVladimirLeonovWang, ZiyangZiyangWang2021-10-182021-10-182009-03https://imec-publications.be/handle/20.500.12860/16279Process development on large-topography microstructures for thermoelectric energy harvestersProceedings paper