Probing local electrical properties in semiconductors with nanometer resolution

Vandervorst, WilfriedWilfriedVandervorstDuhayon, NatasjaNatasjaDuhayonEyben, PierrePierreEybenAlvarez, DavidDavidAlvarezXu, MingweiMingweiXuFouchier, MarcMarcFouchierClarysse, TrudoTrudoClarysse2021-10-152021-10-152003https://imec-publications.be/handle/20.500.12860/8326Probing local electrical properties in semiconductors with nanometer resolutionOral presentation