Sub-resolution feature OPC as an enabler for manufacturing at 0.2 μm and below

Randall, JohnJohnRandallTritchkov, AlexanderAlexanderTritchkovRonse, KurtKurtRonseJaenen, PatrickPatrickJaenen2021-10-012021-10-011998https://imec-publications.be/handle/20.500.12860/2896Sub-resolution feature OPC as an enabler for manufacturing at 0.2 μm and belowJournal article