Clarysse, TrudoTrudoClarysseMoussa, AlainAlainMoussaParmentier, BrigitteBrigitteParmentierBogdanowicz, JanuszJanuszBogdanowiczVandervorst, WilfriedWilfriedVandervorstBender, HugoHugoBenderPfeffer, MarkusMarkusPfefferSchellenberger, MartinMartinSchellenbergerNielsen, PeterPeterNielsenThorsteinsson, SuneSuneThorsteinssonLin, RongRongLinPetersen, DirchDirchPetersen2021-10-182021-10-1820101071-1023https://imec-publications.be/handle/20.500.12860/16890Photovoltage versus microprobe sheet resistance measurements on ultrashallow structuresJournal article