Side walls contribution in integrated 3D SBT-based capacitors: electrical and microstructural point of view

Menou, N.N.MenouMadigou, V.V.MadigouTurquat, Ch.Ch.TurquatGoguenheim, D.D.GoguenheimMuller, Ch.Ch.MullerGoux, LudovicLudovicGouxLisoni, JuditJuditLisoniSchwitters, M.M.SchwittersWouters, DirkDirkWoutersBarret, R.R.BarretHodeau, J-L.J-L.Hodeau2021-10-152021-10-152004https://imec-publications.be/handle/20.500.12860/9286Side walls contribution in integrated 3D SBT-based capacitors: electrical and microstructural point of viewOral presentation