Favia, PaolaPaolaFaviaBargallo Gonzalez, MireiaMireiaBargallo GonzalezSimoen, EddyEddySimoenVerheyen, PeterPeterVerheyenKlenov, DmitriDmitriKlenovBender, HugoHugoBender2021-10-192021-10-1920110013-4651https://imec-publications.be/handle/20.500.12860/18900Nanobeam dffraction: technique evaluation and strain measurement on complementary metal oxide semiconductor devicesJournal article