Quantification of area-selective deposition on nanometer-scale patterns using Rutherford backscattering spectrometry

Claessens, NielsNielsClaessensKhan, Zamran ZahoorZamran ZahoorKhanRahnemaihaghighi, NeginNeginRahnemaihaghighiDelabie, AnneliesAnneliesDelabieVantomme, AndreAndreVantommeVandervorst, WilfriedWilfriedVandervorstMeersschaut, JohanJohanMeersschaut2022-12-152022-11-122022-12-1520222045-2322WOS:000873838100042https://imec-publications.be/handle/20.500.12860/40723Quantification of area-selective deposition on nanometer-scale patterns using Rutherford backscattering spectrometryJournal article10.1038/s41598-022-22645-8WOS:000873838100042ION-BEAM ANALYSISMEDLINE:36272993