Wang, BoBoWangTanaka, ShujiShujiTanakaGuo, BinBinGuoVereecke, GuyGuyVereeckeSeveri, SimoneSimoneSeveriWitvrouw, AnnAnnWitvrouwWevers, MartineMartineWeversDe Wolf, IngridIngridDe Wolf2021-10-202021-10-202012https://imec-publications.be/handle/20.500.12860/21829Outgassing study of thin films used for poly-SiGe based vacuum packaging of MEMSProceedings paperhttp://ieeexplore.ieee.org/document/6306325/