Experimental study of the effective mobility in doped- and undoped-channel triple-gate FinFET structures

Rudenko, TamaraTamaraRudenkoKilchytska, ValeriaValeriaKilchytskaCollaert, NadineNadineCollaertJurczak, GosiaGosiaJurczakNazarov, A.A.NazarovFlandre, DenisDenisFlandre2021-10-162021-10-162007https://imec-publications.be/handle/20.500.12860/12816Experimental study of the effective mobility in doped- and undoped-channel triple-gate FinFET structuresOral presentation