Loo, RogerRogerLooHikavyy, AndriyAndriyHikavyyWitters, LiesbethLiesbethWittersSchulze, AndreasAndreasSchulzeArimura, HiroakiHiroakiArimuraCott, DaireDaireCottMitard, JeromeJeromeMitardPorret, ClémentClémentPorretMertens, HansHansMertensRyan, PaulPaulRyanWall, JohnJohnWallMatney, KevinKevinMatneyWormington, MatthewMatthewWormingtonFavia, PaolaPaolaFaviaRichard, OlivierOlivierRichardThean, AaronAaronTheanHoriguchi, NaotoNaotoHoriguchiCollaert, NadineNadineCollaert2021-10-242021-10-2420172162-8769https://imec-publications.be/handle/20.500.12860/28854Processing technologies for advanced Ge devicesJournal article10.1149/2.0301612jsshttp://jss.ecsdl.org/content/6/1/P14.abstract