Measurement of nonuniform stresses in semiconductors by the micro-Raman method

Pinardi, KuntjoroKuntjoroPinardiJain, SureshSureshJainMaes, HermanHermanMaesVan Overstraeten, RogerRogerVan OverstraetenWillander, M.M.WillanderAtkinson, A.A.Atkinson2021-10-012021-10-011998https://imec-publications.be/handle/20.500.12860/2863Measurement of nonuniform stresses in semiconductors by the micro-Raman methodProceedings paper