Norga, GerdGerdNorgaPlatero, M.M.PlateroBlack, K. A.K. A.BlackReddy, A. J.A. J.ReddyMichel, J.J.MichelKimerling, L. C.L. C.Kimerling2021-09-302021-09-301997https://imec-publications.be/handle/20.500.12860/2060Mechanism of copper deposition on silicon from dilute hydrofluoric acid solutionJournal article