CMP of a RU based layer in an advanced Cu low-k stack

Vaes, JanJanVaesSinapi, FabriceFabriceSinapiHernandez, Jose LuisJose LuisHernandezSantoro, GaetanoGaetanoSantoroNguyen, OlivierOlivierNguyenWang, JamesJamesWang2021-10-162021-10-162007-10https://imec-publications.be/handle/20.500.12860/13008CMP of a RU based layer in an advanced Cu low-k stackProceedings paper